Description
Data (mbar)
Test procedure Permissible deviation
Allowable system leakage of 300 mbar
vacuum in 1 minute. <=30 mbar
Allowable leakage of actuators with line
at 300 mbar vacuum in 1 minute <=25 mbar
Special Tools:
Data (mbar)
Test procedure Permissible deviation
Allowable system leakage of 300 mbar
vacuum in 1 minute. <=30 mbar
Allowable leakage of actuators with line
at 300 mbar vacuum in 1 minute <=25 mbar